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Friday, November 19, 2021

Plumbing the depths: Defect distribution in ion-implanted SiC diodes

Introducing a vertical arrangement of n and p layers into the drift layer of semiconductors to enable bipolar operation is a way around the 'unipolar limit' problem in semiconductors. But defect generation during the fabrication of such devices is a matter of concern. Researchers have examined the depth and distribution of defects formed by aluminum ion implantation in silicon carbide bipolar diodes to identify ways to induce efficient conductivity modulation.

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